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API is a world leader on coordinate measurement solutions. Leading the metrology industry through automation, precision, and innovation, API products are used by many of the world’s leading automotive, aerospace, machine tool, and CMM manufacturers.
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API is a world leader on coordinate measurement solutions. API Products and Services are used by many of the world’s leading automotive, aerospace, machine tool, and CMM manufacturers.
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Laser Tracker Inspection for Lithography Machine Base Installation
Lithography machine bases demand micron-level alignment and stable reference geometry. This case study shows how API’s Radian laser tracker helps semiconductor teams inspect, adjust, and document base installation with one unified 3D coordinate system.
Laser-Tracker-Prüfung bei der Installation von Lithografiemaschinenbasen
Lithografiemaschinenbasen brauchen eine stabile Referenzgeometrie und Ausrichtung im Mikrometerbereich. Diese Fallstudie zeigt, wie der API Radian Laser Tracker Halbleiterteams bei Prüfung, Justage und Dokumentation der Basisinstallation unterstützt.
Inspection laser tracker pour l’installation de bases de machines de lithographie
Les bases de machines de lithographie exigent une géométrie de référence stable et un alignement au micron. Cette étude de cas montre comment le Laser Tracker Radian d’API aide les équipes semi-conducteurs à inspecter, régler et documenter l’installation.
Inspeção com laser tracker na instalação de bases de máquinas de litografia
Bases de máquinas de litografia exigem geometria de referência estável e alinhamento em nível micrométrico. Este estudo de caso mostra como o Laser Tracker Radian da API ajuda equipes de semicondutores a inspecionar, ajustar e documentar a instalação.
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